photolithography processing systems


used in industries such as semiconductors, medical and biomedical, micro OLED, microsystems (MEMS), glass and optical components.



Fast help

For immediate troubleshooting, contact our help desk.

+49 7731 16 995 66

Service offerings

We provide service and support to minimize maintenance costs while maximizing production availability.
Customers requiring "support" can choose between first, second or third level support, either remote or on-site.

  • Telephone support
  • Remote maintenance
  • Consulting and engineering services
  • Configurable technical training options

Spare part supply

We source spare parts for both Osiris and 3rd party equipment. In addition, customers operating older manufacturing systems often find difficulty in sourcing spare parts. We are able to support customers operating legacy systems by utilizing our network of parts manufacturers and suppliers.

Please contact us using the below form regarding your spare parts issues. A customer service representative will contact you following receipt of your request.

Use our contact form for spare parts.
or contact our sales office. Email: